Design and fabrication of nanoimprinted polymer optical devices

نویسندگان

  • Nikolaos Kehagias
  • Vincent Reboud
  • Marc Zelsmann
  • Clivia M. Sotomayor
  • Beatriz Hernandez Juarez
  • Isabelle Ledoux
  • Joseph Zyss
چکیده

The need for accessible, flexible and low-cost functional optical devices and integrated optics is becoming increasingly acute as the optical communication network is expanding very fast. Polymer optical devices are expected to meet these requirements because they can be fabricated using a low-cost process with high manufacturing output. Polymer optics feature sizes down to 100 nm which could potentially meet key challenges in high quality optical communications systems. We report on the feasibility and process parameters of nanoimprint lithography (NIL) to fabricate waveguides, gratings, splitters and interferometers. This technique is very promising for the fabrication of complex polymer optical devices.

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تاریخ انتشار 2006